Semiconductor device having nanosheet transistor and methods of fabrication thereof

ABSTRACT

A semiconductor device structure is provided. The device includes first semiconductor layers and second semiconductor layers disposed below and aligned with the first semiconductor layers. Each first semiconductor layer is surrounded by a first and fourth intermixed layers. The first intermixed layer is disposed between the first semiconductor layer and the fourth intermixed layer and includes a first and second materials. The fourth intermixed layer includes a third and fourth materials. Each second semiconductor layer is surrounded by a second and third intermixed layers. The second intermixed layer is disposed between the second semiconductor layer and the third intermixed layer and includes the first and a fifth material. The third intermixed layer includes the third and a sixth material. The second and fourth material are a dipole material having a first polarity, and the fifth and sixth material are a dipole material having a second polarity opposite the first polarity.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs. Such scaling down presents new challenge.

In pursuit of higher device density, higher performance, and lowercosts, challenges from both fabrication and design issues have resultedin the development of three-dimensional designs, such as a multi-gatefield effect transistor (FET), including a nanosheet FET. In a nanosheetFET, all side surfaces of the channel are surrounded by the gateelectrode, which allows for fuller depletion in the channel and resultsin less short-channel effects and better gate control. As transistordimensions are continually scaled down, further improvements of thenanosheet FET are needed.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1-12 are perspective views of various stages of manufacturing asemiconductor device structure in accordance with some embodiments.

FIGS. 13A, 13B, 13C to 22A, 22B, 22C are cross-sectional side views ofvarious stages of manufacturing the semiconductor device structure takenalong line A-A, line B-B, and line C-C of FIG. 12, respectively, inaccordance with some embodiments.

FIGS. 23-30 are enlarged views of a region of FIG. 22B showing variousstages of manufacturing the semiconductor device structure in accordancewith some embodiments.

FIGS. 31A-31B illustrate a portion of the first semiconductor layers ofFIG. 30 in accordance with alternative embodiments.

FIGS. 32-38 are enlarged views of a region of FIG. 22B showing variousstages of manufacturing the semiconductor device structure in accordancewith some embodiments.

FIGS. 39A-39B illustrate a portion of the first semiconductor layers ofFIG. 38 in accordance with alternative embodiments.

FIGS. 40-41 are enlarged views of a region of FIG. 22B showing variousstages of manufacturing the semiconductor device structure in accordancewith some embodiments.

FIG. 42A illustrates an alternative embodiment incorporating variousembodiments shown in FIGS. 29A-29B, 31A-31B, 37A-37B, and 39A-39B.

FIGS. 42B-42C are enlarged views of regions of FIG. 42A in accordancewith alternative embodiments.

FIGS. 43A-43C are cross-sectional side views of one of various stages ofmanufacturing the semiconductor device structure taken along line A-A,line B-B, and line C-C of FIG. 12, respectively, in accordance with someembodiments.

FIG. 43D is an enlarged view of a portion of the semiconductor devicestructure showing first and second nanosheet transistors, in accordancewith some embodiments.

FIGS. 44A, 44B, 44C are cross-sectional side views of one of variousstages of manufacturing the semiconductor device structure taken alongline A-A, line B-B, and line C-C of FIG. 12, respectively, in accordancewith some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “over,” “on,” “top,” “upper” and the like, may be used hereinfor ease of description to describe one element or feature'srelationship to another element(s) or feature(s) as illustrated in thefigures. The spatially relative terms are intended to encompassdifferent orientations of the device in use or operation in addition tothe orientation depicted in the figures. The apparatus may be otherwiseoriented (rotated 90 degrees or at other orientations) and the spatiallyrelative descriptors used herein may likewise be interpretedaccordingly.

Embodiments of the present disclosure provide a semiconductor devicestructure having complementary field effect transistors (CFETs) withmulti-threshold voltage schemes. Each CFET is formed by verticallystacking a first nanosheet FET (e.g., an n-channel FET) on a secondnanosheet FET (e.g., a p-channel FET), and each nanosheet FET includesone or more semiconductor layers from a stack of semiconductor layers.The one or more semiconductor layers form nanosheet channels of thep-channel and n-channel nanosheet FET. Each of the one or moresemiconductor layers is surrounded by a gate electrode layer. Accordingto embodiments of the present disclosure, an interfacial layer and/or ahigh-K dielectric layer between the nanosheet channels and the gateelectrode layer are selectively doped or intermixed with one or morep-dipole and n-dipole metals to provide different threshold voltageschemes for the p-channel and the n-channel nanosheet FETs,respectively. As a result, the CFETs in different regions of thesemiconductor device structure can be operated at different thresholdvoltages, resulting in improved device reliability and performance.Various embodiments are discussed in more detail below.

While the embodiments of this disclosure are discussed with respect tonanosheet channel FETs, implementations of some aspects of the presentdisclosure may be used in other processes and/or in other devices, suchas planar FETs, Fin-FETs, Horizontal Gate All Around (HGAA) FETs,Vertical Gate All Around (VGAA) FETs, and other suitable devices. Aperson having ordinary skill in the art will readily understand othermodifications that may be made are contemplated within the scope of thisdisclosure. In cases where gate all around (GAA) transistor structuresare adapted, the GAA transistor structures may be patterned by anysuitable method. For example, the structures may be patterned using oneor more photolithography processes, including double-patterning ormulti-patterning processes. Generally, double-patterning ormulti-patterning processes combine photolithography and self-alignedprocesses, allowing patterns to be created that have, for example,pitches smaller than what is otherwise obtainable using a single, directphotolithography process. For example, in one embodiment, a sacrificiallayer is formed over a substrate and patterned using a photolithographyprocess. Spacers are formed alongside the patterned sacrificial layerusing a self-aligned process. The sacrificial layer is then removed, andthe remaining spacers may then be used to pattern the GAA structure.

FIGS. 1-44C show exemplary processes for manufacturing a semiconductordevice structure 100 according to embodiments of the present disclosure.It is understood that additional operations can be provided before,during, and after processes shown by FIGS. 1-44C, and some of theoperations described below can be replaced or eliminated, for additionalembodiments of the method. The order of the operations/processes is notlimiting and may be interchangeable.

FIGS. 1-12 are perspective views of various stages of manufacturing asemiconductor device structure 100 in accordance with some embodiments.As shown in FIG. 1, a semiconductor device structure 100 includes astack of semiconductor layers 104 formed over a substrate 101. Thesubstrate 101 may be a semiconductor substrate. The substrate 101 mayinclude a single crystalline semiconductor material such as, but notlimited to silicon (Si), germanium (Ge), silicon germanium (SiGe),gallium arsenide (GaAs), indium antimonide (InSb), gallium phosphide(GaP), gallium antimonide (GaSb), indium aluminum arsenide (InAlAs),indium gallium arsenide (InGaAs), gallium antimony phosphide (GaSbP),gallium arsenic antimonide (GaAsSb) and indium phosphide (InP). In oneembodiment, the substrate 101 is made of silicon. In some embodiments,the substrate 101 is a silicon-on-insulator (SOI) substrate having aninsulating layer (not shown) disposed between two silicon layers forenhancement. In one aspect, the insulating layer is an oxygen-containinglayer.

The substrate 101 may include one or more buffer layers (not shown) onthe surface of the substrate 101. The buffer layers can serve togradually change the lattice constant from that of the substrate to thatof the source/drain (S/D) regions to be grown on the substrate 101. Thebuffer layers may be formed from epitaxially grown single crystallinesemiconductor materials such as, but not limited to Si, Ge, germaniumtin (GeSn), SiGe, GaAs, InSb, GaP, GaSb, InAlAs, InGaAs, GaSbP, GaAsSb,GaN, GaP, and InP. In one embodiment, the substrate 101 includes SiGebuffer layers epitaxially grown on the silicon substrate 101. Thegermanium concentration of the SiGe buffer layers may increase from 30atomic percent germanium for the bottom-most buffer layer to 70 atomicpercent germanium for the top-most buffer layer.

The substrate 101 may include various regions that have been doped withimpurities (e.g., dopants having p-type or n-type conductivity).Depending on circuit design, the dopants may be, for example boron foran n-type field effect transistors (NFET) and phosphorus for a p-typefield effect transistors (PFET).

The stack of semiconductor layers 104 includes semiconductor layers madeof different materials to facilitate formation of nanosheet channels ina multi-gate device, such as nanosheet channel FETs. In someembodiments, the stack of semiconductor layers 104 includes firstsemiconductor layers 106 (e.g., 106 a and 106 b) and secondsemiconductor layers 108 (e.g., 108 a and 108 b). In some embodiments,the stack of semiconductor layers 104 includes alternating first andsecond semiconductor layers 106, 108. The first semiconductor layers 106and the second semiconductor layers 108 are made of semiconductormaterials having different etch selectivity and/or oxidation rates. Forexample, the first semiconductor layers 106 may be made of Si and thesecond semiconductor layers 108 may be made of SiGe. In some examples,the first semiconductor layers 106 may be made of SiGe and the secondsemiconductor layers 108 may be made of Si. Alternatively, in someembodiments, either of the semiconductor layers 106, 108 may be orinclude other materials such as Ge, SiC, GeAs, GaP, InP, InAs, InSb,GaAsP, AlInAs, AlGaAs, InGaAs, GaInP, GaInAsP, or any combinationsthereof.

The first semiconductor layers 106 or portions thereof may formnanosheet channel(s) of the semiconductor device structure 100 in laterfabrication stages. The term nanosheet is used herein to designate anymaterial portion with nanoscale, or even microscale dimensions, andhaving an elongate shape, regardless of the cross-sectional shape ofthis portion. Thus, this term designates both circular and substantiallycircular cross-section elongate material portions, and beam orbar-shaped material portions including, for example, a cylindrical inshape or substantially rectangular cross-section. The nanosheetchannel(s) of the semiconductor device structure 100 may be surroundedby a gate electrode. The semiconductor device structure 100 may includea nanosheet transistor. The nanosheet transistors may be referred to asnanowire transistors, gate-all-around (GAA) transistors, multi-bridgechannel (MBC) transistors, or any transistors having the gate electrodesurrounding the channels. The use of the first semiconductor layers 106to define a channel or channels of the semiconductor device structure100 is further discussed below.

The first and second semiconductor layers 106, 108 are formed by anysuitable deposition process, such as epitaxy. By way of example,epitaxial growth of the layers of the stack of semiconductor layers 104may be performed by a molecular beam epitaxy (MBE) process, ametalorganic chemical vapor deposition (MOCVD) process, and/or othersuitable epitaxial growth processes.

In some embodiments, the semiconductor device structure 100 includes acomplementary FET (CFET) in which two or more nanosheet FETs arevertically stacked on top of one another. In such a case, the firstsemiconductor layers 106 can include channels for the two or morenanosheet FETs. In the embodiment shown in FIG. 1, for example, thefirst semiconductor layers 106 a may define the channels of a first FET,such as a n-type FET (N-FET), and the first semiconductor layers 106 bmay define the channels of a second FET, such as a p-type FET (P-FET).The thickness of the first semiconductor layers 106 is chosen based ondevice performance considerations. In some embodiments, each firstsemiconductor layer 106 has a thickness ranging from about 3 nanometers(nm) to about 10 nm. The second semiconductor layers 108 (e.g., 108a-108 c) may eventually be removed and serve to define spaces for a gatestack to be formed therein. Likewise, each second semiconductor layer108 (e.g., 108 a and 108 b) may have a thickness that is equal, less, orgreater than the thickness of the first semiconductor layer 106,depending on device performance considerations. In one aspect, eachsecond semiconductor layer 108 (e.g., 108 a and 108 b) has a thicknessthat is equal to the thickness of the first semiconductor layer 106(e.g., 106 a and 106 b).

In some embodiments, the second semiconductor layer 108 c disposedbetween the first semiconductor layer 106 a in the first FET (e.g.,n-channel FET) and the first semiconductor layer 106 b in the second FET(e.g., p-channel FET) has a greater thickness than the thickness of therest second semiconductor layers 108 a and 108 b to help define boundaryof the first FET and the second FET at a later stage. In such cases, thethickness of the second semiconductor layer 108 c may be about 1.5 toabout 3 times thicker than the first semiconductor layer 106 (e.g., 106a and 106 b) or the second semiconductor layer 108 (e.g., 108 a and 108b).

While six first semiconductor layers 106 and seven second semiconductorlayers 108 are alternately arranged as illustrated in FIG. 1, it can beappreciated that any number of first and second semiconductor layers106, 108 can be formed in the stack of semiconductor layers 104,depending on the predetermined number of nanosheet channels needed foreach FET of the semiconductor device structure 100.

FIG. 2 is a perspective view of one of the various stages ofmanufacturing the semiconductor device structure 100, in accordance withsome embodiments. As shown in FIG. 2, fin structures 112 are formed fromthe stack of semiconductor layers 104. Each fin structure 112 has anupper portion including the semiconductor layers 106, 108, a wellportion 116 formed from the substrate 101, and a portion of a maskstructure 110. The mask structure 110 is formed over the stack ofsemiconductor layers 104 prior to forming the fin structures 112. Themask structure 110 may include an oxygen-containing layer 110 a and anitrogen-containing layer 110 b. The oxygen-containing layer 110 a maybe a pad oxide layer, such as a SiO₂ layer. The nitrogen-containinglayer 110 b may be a pad nitride layer, such as Si₃N₄. The maskstructure 110 may be formed by any suitable deposition process, such aschemical vapor deposition (CVD) process.

The fin structures 112 may be fabricated using suitable processesincluding double-patterning or multi-patterning processes. Generally,double-patterning or multi-patterning processes combine photolithographyand self-aligned processes, allowing patterns to be created that have,for example, pitches smaller than what is otherwise obtainable using asingle, direct photolithography process. For example, in one embodiment,a sacrificial layer is formed over a substrate and patterned using aphotolithography process. Spacers are formed alongside the patternedsacrificial layer using a self-aligned process. The sacrificial layer isthen removed, and the remaining spacers, or mandrels, may then be usedto pattern the fin structures 112 by etching the stack of semiconductorlayers 104 and the substrate 101. The etch process can include dry etch,wet etch, reactive ion etch (RIE), and/or other suitable processes.While two fin structures 112 are shown, the number of the fin structuresis not limited to two.

In some embodiments, the fin structures 112 may be fabricated usingsuitable processes including photolithography and etch processes. Thephotolithography process may include forming a photoresist layer (notshown) over the mask structure 110, exposing the resist to a pattern,performing post-exposure bake processes, and developing the resist toform a patterned resist. In some embodiments, patterning the resist toform the patterned resist may be performed using an electron beam(e-beam) lithography process. The patterned resist may then be used toprotect regions of the substrate 101, and layers formed thereupon, whilean etch process forms trenches 114 in unprotected regions through themask structure 110, the stack of semiconductor layers 104, and into thesubstrate 101, thereby leaving the extending fin structures 112. Thetrenches 114 may be etched using a dry etch (e.g., RIE), a wet etch,and/or combination thereof.

In FIG. 3, a liner 115 is formed over the substrate 101 and the finstructures 112. The liner 115 may be formed of a semiconductor material,such as Si. In some embodiments, the liner 115 is made of the samematerial as the substrate 101. The liner 115 may be a conformal layerformed by any suitable process, such as an atomic layer deposition (ALD)process. The term “conformal” may be used herein for ease of descriptionupon a layer having substantial same thickness over various regions.

In FIG. 4, after the fin structures 112 are formed, an insulatingmaterial 118 is formed on the substrate 101. The insulating material 118fills the trenches 114 between neighboring fin structures 112 until thefin structures 112 are embedded in the insulating material 118. Then, aplanarization operation, such as a chemical mechanical polishing (CMP)method and/or an etch-back method, is performed to expose the top of thefin structures 112. The insulating material 118 may be made of siliconoxide, silicon nitride, silicon oxynitride (SiON), SiOCN, SiCN,fluorine-doped silicate glass (FSG), a low-K dielectric material, or anysuitable dielectric material. The insulating material 118 may be formedby any suitable method, such as low-pressure chemical vapor deposition(LPCVD), plasma enhanced CVD (PECVD) or flowable CVD (FCVD).

In FIG. 5, the insulating material 118 is recessed to form an isolationregion 120. The recess of the insulating material 118 exposes portionsof the fin structures 112. The recess of the insulating material 118reveals the trenches 114 between the neighboring fin structures 112. Theisolation region 120 may be formed using a suitable process, such as adry etching process, a wet etching process, or a combination thereof. Atop surface of the insulating material 118 may be level with or below asurface of the second semiconductor layers 108 (e.g., 108 b) in contactwith the well portion 116.

In FIG. 6, a cladding layer 117 is formed on the exposed surface of theliner 115 (FIG. 5). In some embodiments, the liner 115 may be diffusedinto the cladding layer 117 during the formation of the cladding layer117, resulting in the cladding layer 117 in contact with the stack ofsemiconductor layers 104. The cladding layer 117 may be or include asemiconductor material, which allows the cladding layer 117 to grow onsemiconductor materials but not on dielectric materials. For example,the cladding layer 117 may be SiGe and is grown on the Si of the liner115 but not on the dielectric material of the insulating material 118.In some embodiments, the cladding layer 117 may be formed by firstforming a semiconductor layer on the liner 115 and the insulatingmaterial 118. An etch process is then performed to remove portions ofthe semiconductor layer formed on the insulating material 118. In someembodiments, the cladding layer 117 and the second semiconductor layers108 include the same material having the same etch selectivity. Forexample, the cladding layer 117 and the second semiconductor layers 108a, 108 b, 108 c may be or include SiGe. The cladding layer 117 and thesecond semiconductor layers 108 a, 108 b, 108 c may be removedsubsequently to create space for the gate electrode layer.

In FIG. 7, a liner 119 is formed on the cladding layer 117 and the topsurface of the insulating material 118. The liner 119 may include alow-k dielectric material (e.g., a material having a k value lower than7), such as SiO₂, SiN, SiCN, SiOC, or SiOCN. The liner 119 may be formedby a conformal process, such as an ALD process. The liner 119 may have athickness ranging from about 1 nm to about 6 nm. The liner 119 mayfunction as a shell to protect a flowable oxide material to be formed inthe trenches 114 (FIG. 6) during subsequent removal of the claddinglayer 117. Thus, if the thickness of the liner 119 is less than about 1nm, the flowable oxide material may not be sufficiently protected. Onthe other hand, if the thickness of the liner 119 is greater than about6 nm, the trenches 114 (FIG. 6) may be filled.

A dielectric material 121 is formed in the trenches 114 (FIG. 6) and onthe liner 119, as shown in FIG. 7. The dielectric material 121 may be anoxygen-containing material, such as an oxide, formed by FCVD. Theoxygen-containing material may have a K value less than about 7, forexample less than about 3. A planarization process, such as a CMPprocess, may be performed to remove portions of the liner 119 and thedielectric material 121 formed over the fin structures 112. The portionof the cladding layer 117 disposed on the nitrogen-containing layer isexposed after the planarization process.

In FIG. 8, the liner 119 and the dielectric material 121 are recessed tothe level of the topmost second semiconductor layer 108 a. For example,in some embodiments, after the recess process, the dielectric material121 may include a top surface 121 a that is substantially level with atop surface 108 a-1 of the topmost second semiconductor layer 108 a. Thetop surface 108 a-1 of the topmost second semiconductor layer 108 a maybe in contact with the mask structure 110, such as in contact with theoxygen-containing layer 110 a. Likewise, the liner 119 may be recessedto the same level as the dielectric material 121. The recess of theliner 119 and the dielectric material 121 may be performed by anysuitable process, such as dry etch, wet etch, or a combination thereof.In some embodiments, a first etch process may be performed to recess thedielectric material 121, followed by a second etch process to recess theliner 119. The etch processes may be selective etch processes that donot remove the semiconductor material of the cladding layer 117. As aresult of the recess process, trenches 123 are formed between the finstructures 112.

In FIG. 9, a dielectric material 125 is formed in the trenches 123 (FIG.8) and on the dielectric material 121 and the liner 119. The dielectricmaterial 125 may include SiO, SiN, SiC, SiCN, SiON, SiOCN, AlO, AlN,AlON, ZrO, ZrN, ZrAlO, HfO, or other suitable dielectric material. Insome embodiments, the dielectric material 125 includes a high-kdielectric material (e.g., a material having a k value greater than 7).The dielectric material 125 may be formed by any suitable process, suchas a CVD, PECVD, FCVD, or ALD process. A planarization process, such asa CMP process, is performed until the nitrogen-containing layer 110 b ofthe mask structure 110 is exposed. The planarization process removesportions of the dielectric material 125 and the cladding layer 117disposed over the mask structure 110. The liner 119, the dielectricmaterial 121, and the dielectric material 125 together may be referredto as a dielectric feature 127. The dielectric feature 127 serves as adielectric fin that separates adjacent source/drain (S/D) epitaxialfeatures and adjacent gate electrode layers.

In FIG. 10, the cladding layers 117 are recessed, and the maskstructures 110 are removed. The recess of the cladding layers 117 may beperformed by any suitable process, such as dry etch, wet etch, or acombination thereof. The recess process may be controlled so that theremaining cladding layers 117 are substantially at the same level as thetop surface 108 a-1 of the topmost second semiconductor layer 108 a inthe stack of semiconductor layers 102. The etch process may be aselective etch process that does not remove the dielectric material 125.The removal of the mask structures 110 may be performed by any suitableprocess, such as dry etch, wet etch, or a combination thereof. Theremoval of the mask structure 110 exposes the top surfaces 180 a-1 ofthe topmost second semiconductor layers 108 a in the stacks ofsemiconductor layers 104.

In FIG. 11, one or more sacrificial gate structures 130 (only one isshown) are formed over the semiconductor device structure 100. Thesacrificial gate structures 130 are formed over a portion of the finstructures 112. Each sacrificial gate structure 130 may include asacrificial gate dielectric layer 132, a sacrificial gate electrodelayer 134, and a mask layer 136. The sacrificial gate dielectric layer132, the sacrificial gate electrode layer 134, and the mask layer 136may be formed by sequentially depositing blanket layers of thesacrificial gate dielectric layer 132, the sacrificial gate electrodelayer 134, and the mask layer 136, followed by pattern and etchprocesses. For example, the pattern process includes a lithographyprocess (e.g., photolithography or e-beam lithography) which may furtherinclude photoresist coating (e.g., spin-on coating), soft baking, maskaligning, exposure, post-exposure baking, photoresist developing,rinsing, drying (e.g., spin-drying and/or hard baking), other suitablelithography techniques, and/or combinations thereof. In someembodiments, the etch process may include dry etch (e.g., RIE), wetetch, other etch methods, and/or combinations thereof.

By patterning the sacrificial gate structure 130, the stacks ofsemiconductor layers 104 of the fin structures 112 are partially exposedon opposite sides of the sacrificial gate structure 130. The portions ofthe fin structures 112 that are covered by the sacrificial gateelectrode layer 134 of the sacrificial gate structure 130 serve aschannel regions for the semiconductor device structure 100. The finstructures 112 that are partially exposed on opposite sides of thesacrificial gate structure 130 define source/drain (S/D) regions for thesemiconductor device structure 100. While one sacrificial gate structure130 is shown, two or more sacrificial gate structures 130 may bearranged along the X direction in some embodiments.

Next, gate spacers 138 are formed on sidewalls of the sacrificial gatestructures 130. The gate spacers 138 may be formed by first depositing aconformal layer that is subsequently etched back to form sidewall gatespacers 138. For example, a spacer material layer can be disposedconformally on the exposed surfaces of the semiconductor devicestructure 100. The conformal spacer material layer may be formed by anALD process. Subsequently, anisotropic etch is performed on the spacermaterial layer using, for example, RIE. During the anisotropic etchprocess, most of the spacer material layer is removed from horizontalsurfaces, such as the tops of the fin structures 112, the cladding layer117, the dielectric material 125, leaving the gate spacers 138 on thevertical surfaces, such as the sidewalls of sacrificial gate structures130. The gate spacer 138 may be made of a dielectric material such assilicon oxide, silicon nitride, silicon carbide, silicon oxynitride,SiCN, silicon oxycarbide, SiOCN, and/or combinations thereof.

In FIG. 12, exposed portions of the fin structures 112, exposed portionsof the cladding layers 117, and exposed portions of the dielectricmaterial 125 not covered by the sacrificial gate structures 130 and thegate spacers 138 are selectively recessed by using one or more suitableetch processes, such as dry etch, wet etch, or a combination thereof. Insome embodiments, exposed portions of the stacks of semiconductor layers104 of the fin structures 112 are removed, exposing portions of the wellportions 116. As shown in FIG. 12, the exposed portions of the finstructures 112 are recessed to a level at or below the top surface 118 aof the insulating material 118. The recess processes may include an etchprocess that recesses the exposed portions of the fin structures 112 andthe exposed portions of the cladding layers 117.

FIGS. 13A, 13B, and 13C are cross-sectional side views of thesemiconductor device structure 100 taken along line A-A, line B-B, andline C-C of FIG. 12, respectively, in accordance with some embodiments.

FIGS. 14A, 14B, and 14C are cross-sectional side views of one of variousstages of manufacturing the semiconductor device structure 100 takenalong line A-A, line B-B, and line C-C of FIG. 12, respectively, inaccordance with some embodiments. As shown in FIG. 14A, edge portions ofeach second semiconductor layer 108 (e.g., 108 a, 108 b, 108 c) of thestack of semiconductor layers 104 are removed horizontally along the Xdirection. The removal of the edge portions of the second semiconductorlayers 108 forms cavities. In some embodiments, the portions of thesecond semiconductor layers 108 are removed by a selective wet etchingprocess. In cases where the second semiconductor layers 108 are made ofSiGe and the first semiconductor layers 106 are made of silicon, thesecond semiconductor layer 108 can be selectively etched using a wetetchant such as, but not limited to, ammonium hydroxide (NH₄OH),tetramethylammonium hydroxide (TMAH), ethylenediamine pyrocatechol(EDP), or potassium hydroxide (KOH) solutions.

After removing edge portions of each second semiconductor layers 108, adielectric layer (or so-called inner spacer) is deposited in thecavities to form dielectric spacers 144. The dielectric spacers 144 maybe made of a low-K dielectric material, such as SiON, SiCN, SiOC, SiOCN,or SiN. The dielectric spacers 144 may be formed by first forming aconformal dielectric layer using a conformal deposition process, such asALD, followed by an anisotropic etching to remove portions of theconformal dielectric layer other than the dielectric spacers 144. Thedielectric spacers 144 are protected by the first semiconductor layers106 during the anisotropic etching process. The remaining secondsemiconductor layers 108 (e.g., 108 a, 108 b, 108 c) are capped betweenthe dielectric spacers 144 along the X direction.

FIGS. 15A, 15B, and 15C are cross-sectional side views of one of variousstages of manufacturing the semiconductor device structure 100 takenalong line A-A, line B-B, and line C-C of FIG. 12, respectively, inaccordance with some embodiments. As shown in FIGS. 15A and 15C,epitaxial S/D features 146 are formed on the well portion 116 of the finstructures 112. The epitaxial S/D features 146 may include or be made ofone or more layers of Si, SiP, SiC and SiCP for n-channel FETs or Si,SiGe, Ge for p-channel FETs. For p-channel FETs, p-type dopants, such asboron (B), may also be included in the epitaxial S/D features 146. Insome embodiments, the epitaxial S/D feature 146 uses one or more layersof Si, SiGe, and Ge for a p-channel FET. The epitaxial S/D features 146may be formed by an epitaxial growth method using CVD, ALD or MBE. Theepitaxial S/D features 146 may grow both vertically and horizontally toform facets, which may correspond to crystalline planes of the materialused for the substrate 101. The epitaxial S/D features 146 are incontact with the first semiconductor layers 106 a, 106 b and dielectricspacers 144, as shown in FIG. 15A. The epitaxial S/D epitaxial features146 may be the S/D regions. In this disclosure, a source region and adrain region are interchangeably used, and the structures thereof aresubstantially the same.

In FIGS. 16A and 16C, the epitaxial S/D features 146 are recessed byremoving a portion of each epitaxial S/D feature 146. The recess of theepitaxial S/D features 146 may be performed by any suitable process,such as dry etch or wet etch that selectively removes a portion of eachepitaxial S/D feature 146 but not the gate spacer 138, the dielectricmaterial 125, and the liner 119. After the removal process, theepitaxial S/D features 146 are in contact with the first semiconductorlayers 106 b and the dielectric spacers 144, as shown in FIG. 16A. Insome embodiments, the semiconductor device structure 100 includes ananosheet p-channel FET having a source epitaxial feature/terminal 146and a drain epitaxial feature/terminal 146 both in contact with one ormore first semiconductor layers 106 b, or one or more channels.

In FIGS. 17A and 17C, a dielectric material 147 is formed over theepitaxial S/D features 146. The dielectric material 147 may include thesame material as the insulating material 118 and may be formed by thesame method as the insulating material 118. In some embodiments, thedielectric material 147 includes an oxide that is formed by FCVD. Thedielectric material 147 may be recessed to a level below the level ofthe first semiconductor layers 106 a, as shown in FIG. 17A. The recessof the dielectric material 147 may be performed by any suitable process,such as dry etch or wet etch that selectively removes a portion of thedielectric material 147 but not the gate spacer 138, the firstsemiconductor layer 106 a, and the dielectric spacers 144.

In FIGS. 18A and 18C, epitaxial S/D features 149 are formed on thedielectric material 147. The epitaxial S/D feature 149 may include oneor more layers of Si, SiP, SiC and SiCP for an n-channel FET or Si,SiGe, Ge for a p-channel FET. In some embodiments, the epitaxial S/Dfeature 149 uses one or more layers of Si, SiP, SiC and SiCP for an-channel FET. The epitaxial S/D features 149 may be formed from thefirst semiconductor layers 106 a (FIG. 17A). The epitaxial S/D features149 may grow both vertically and horizontally to form facets, which maycorrespond to crystalline planes of the material used for the firstsemiconductor layers 106 a. The epitaxial S/D features 149 may be formedby an epitaxial growth method using CVD, ALD or MBE. Likewise, theepitaxial S/D features 149 may be the S/D regions.

As shown in FIGS. 18A and 18C, the source regions of the n-channel FETsand p-channel FETs may be vertically stacked and aligned, the drainregions of the n-channel FETs and the p-channel FETs may be verticallystacked and aligned, and the source of the n-channel FET and the sourceof the p-channel FET may be separated by the dielectric material 147.Vertical stacking of the n-channel FETs and p-channel FETs can increasethe density of the FETs while reducing the cell active area footprintfor the semiconductor devices, such as SRAMs.

In FIGS. 19A and 19C, a contact etch stop layer (CESL) 162 isconformally formed on the exposed surfaces of the semiconductor devicestructure 100. The CESL 162 covers the epitaxial S/D features 146, thegate spacers 138, the dielectric material 125, and the exposed surfaceof the stack of semiconductor layers 104. The CESL 162 may include anoxygen-containing material or a nitrogen-containing material, such assilicon nitride, silicon carbon nitride, silicon oxynitride, carbonnitride, silicon oxide, silicon carbon oxide, or the like, or acombination thereof, and may be formed by CVD, PECVD, ALD, or anysuitable deposition technique. Next, an interlayer dielectric (ILD)layer 164 is formed on the CESL 162 over the semiconductor devicestructure 100. The materials for the ILD layer 164 may includetetraethylorthosilicate (TEOS) oxide, un-doped silicate glass, or dopedsilicon oxide such as borophosphosilicate glass (BPSG), fused silicaglass (FSG), phosphosilicate glass (PSG), boron doped silicon glass(BSG), and/or other suitable dielectric materials comprising Si, O, C,and/or H. The ILD layer 164 may be deposited by a PECVD process or othersuitable deposition technique. In some embodiments, after formation ofthe ILD layer 164, the semiconductor device structure 100 may be subjectto a thermal process to anneal the ILD layer 164.

In FIGS. 20A, 20B, and 20C, after the ILD layer 164 is formed, aplanarization operation, such as CMP, is performed on the semiconductordevice structure 100 to remove portions of the ILD layer 164, the CESL162 and the mask layer 136 until the sacrificial gate electrode layer134 is exposed.

In FIGS. 21A and 21B, the sacrificial gate structure 130 is removed. Theremoval of the sacrificial gate structure 130 forms a trench 166 in theregions where the sacrificial gate electrode layer 134 and thesacrificial gate dielectric layer 132 were removed. The trench 166exposes portions of the cladding layer 117 and the top of the secondsemiconductor layer 108 a. The ILD layer 164 protects the epitaxial S/Dfeatures 146 during the removal of the sacrificial gate structure 130.The sacrificial gate structure 130 can be removed using plasma dryetching and/or wet etching. The sacrificial gate electrode layer 134 maybe first removed by any suitable process, such as dry etch, wet etch, ora combination thereof, followed by the removal of the sacrificial gatedielectric layer 132, which may also be performed by any suitableprocess, such as dry etch, wet etch, or a combination thereof. In someembodiments, a wet etchant such as a tetramethylammonium hydroxide(TMAH) solution can be used to selectively remove the sacrificial gateelectrode layer 134 but not the gate spacers 138, the dielectricmaterial 125, and the CESL 162. In some embodiments, the gate spacers138 may be recessed by the etchant used to remove the sacrificial gateelectrode layer 134 and/or the sacrificial gate dielectric layer 132.

In FIGS. 22A and 22B, the cladding layers 117 and the secondsemiconductor layers 108 (e.g., 108 a, 108 b, 108 c) are removed. Theremoval of the cladding layers 117 and the second semiconductor layers108 exposes the dielectric spacers 144 and the first semiconductorlayers 106 (e.g., 106 a, 106 b). The removal process may be any suitableetch processes, such as dry etch, wet etch, or a combination thereof.The etch process may be a selective etch process that removes thecladding layers 117 (FIG. 21B) and the second semiconductor layers 108but not the gate spacers 138, the CESL 162, the dielectric material 125,and the first semiconductor layers 106. As a result, openings 151 areformed around the first semiconductor layers 106, as shown in FIG. 22B.That is, the portion of the first semiconductor layers 106 not coveredby the dielectric spacers 144 is exposed to the openings 151.

FIGS. 23-28, 29A-29B, 30, 32-36, 37A-37B, 38, 40-41, and 42A areenlarged views of a region 220 of FIG. 22B showing various stages ofmanufacturing the semiconductor device structure 100 in accordance withsome embodiments. For the sake of clarity, the dielectric material 125is omitted in FIGS. 23-28, 29A-29B, 30, 32-36, 37A-37B, 38, 40-41, and42A. In the embodiment shown in FIG. 23, each first semiconductor layer106 b may be a nanosheet channel of a first nanosheet transistor 155,such as a p-channel FET, and each first semiconductor layer 106 a may bea nanosheet channel of a second nanosheet transistor 153, such as an-channel FET. The second nanosheet transistors (e.g., 106 a) aredisposed over and aligned with the first nanosheet transistors (e.g.,106 b) along the Z-direction. Depending on the application, nanosheettransistors having higher thermal budget (e.g., p-channel FETs) may bearranged below nanosheet transistors having lower thermal budget (e.g.,n-channel FETs).

The top surface 133 of the topmost first semiconductor layer 106 a isbelow the top surface 135 of the liner 119 by a height “H” due to theremoval of the topmost second semiconductor layer 108 a (FIG. 21B). Eachfirst semiconductor layer 106 a, 106 b has a first height “H1” of about2 nm to about 15 nm, for example about 3 nm to about 10 nm. In someembodiments, one or more first semiconductor layers 106 a may have afirst height “H1” different from that of one or more first semiconductorlayers 106 a, and one or more first semiconductor layers 106 b may havethe first height “H1” different from that of one or more firstsemiconductor layers 106 b. In some embodiments, one or more firstsemiconductor layers 106 a, 106 b may have a first height while one ormore first semiconductor layers 106 a, 106 b may have a second heightdifferent from the first height. The first height “H1” as used in thisdisclosure may also refer to nanosheet channel height or a thickness ofthe first semiconductor layers 106 a, 106 b.

The opening 151 between the first semiconductor layer 106 b of the firstnanosheet transistor 155 and the first semiconductor layer 106 a of thesecond nanosheet transistor 153 has a second height “H2” that is greaterthan the first height “H1”. The ratio of the second height “H2” to thefirst height “H1” may be in a range of about 1.5 to 3. The second height“H2” provides additional space to compensate for possible over-etch orunder-etch that may occur during recess of the hardmask at a later stage(e.g., FIG. 28) and thus can help define boundary between the firstnanosheet transistor 155 and the second nanosheet transistor 153.Therefore, if the ratio of the second height “H2” to the first height“H1” is less than about 1.5, the hardmask might be recessed to a levelthat is within the first nanosheet transistor 155 or the secondnanosheet transistor 153 due to under-etching or over-etching. On theother hand, if the ratio of the second height “H2” to the first height“H1” is greater than about 3, the manufacturing cost is increasedwithout significant advantage.

In FIG. 24, the semiconductor device structure 100 is subjected to apre-clean process to remove residues or unwanted films from exposedsurfaces of the first semiconductor layers 106 b of the first nanosheettransistor 155 and the first semiconductor layer 106 a of the secondnanosheet transistor 153. The pre-clean process may be any suitable wetcleaning process such as an APM process, which includes at least water(H₂O), ammonium hydroxide (NH₄OH), and hydrogen peroxide (H₂O₂), a HPMprocess, which includes at least H₂O, H₂O₂, and hydrogen chloride (HCl),a SPM process (also known as piranha clean), which includes at leastH₂O₂ and sulfuric acid (H₂SO₄), or any combination thereof.

Next, an interfacial layer (IL) 148 is formed to surround the exposedsurfaces of the first semiconductor layers 106 a, 106 b, as shown inFIG. 24. In some embodiments, the IL 148 may also form on the wellportion 116 of the substrate 101. The IL 148 may include or be made ofan oxygen-containing material or a silicon-containing material, such assilicon oxide, silicon oxynitride, oxynitride, hafnium silicate, etc.The IL 148 may be formed by CVD, ALD or any suitable conformaldeposition technique. In one embodiment, the IL 148 is formed using ALD.The thickness of the IL 148 is chosen based on device performanceconsiderations. In some embodiments, the IL 148 has a thickness rangingfrom about 0.5 nm to about 2 nm.

In FIG. 25, a first dipole layer 150 is formed on the IL 148 and theexposed surfaces of the semiconductor device structure 100. In someembodiments, the first dipole layer 150 forms on the liner 119, theinsulating material 118, the liner 115, and the IL 148 that is incontact with the well portion 116 of the substrate 101. Depending on theconductivity type of the first nanosheet transistor 155, the firstdipole layer 150 may be configured to include positive polarity ornegative polarity. The first dipole layer 150 serves to enhance ormodify threshold voltage for the first nanosheet transistor 155. Incases where the first nanosheet transistor 155 is a p-channel FET, thefirst dipole layer 150 can be a positive polarity dipole (p-dipole)layer formed from a material inherently including a positive polarity.Such materials may include, but are not limited to, aluminum oxide(Al₂O₃), titanium dioxide (TiO₂), germanium oxide (GeO₂), or the like.The first dipole layer 150 can be formed by ALD, CVD, or any suitableconformal deposition technique in order to ensure uniform thickness ofthe first dipole layer 150. The thickness of the first dipole layer 150is chosen based on device performance considerations. In someembodiments, the first dipole layer 150 has a thickness ranging fromabout 0.05 nm to about 2 nm.

In some alternative embodiments, which can be combined with anyembodiment(s) of this disclosure, the first dipole layer 150 may beformed to surround the exposed surfaces of the first semiconductorlayers 106 a, 106 b, followed by formation of the IL 148 on the firstdipole layer 150.

In FIG. 26, a mask layer 152 is formed on the first dipole layer 150 andin each opening 151 (FIG. 25). The mask layer 152 fills the opening 151to a level so that at least the first dipole layer 150 within the secondnanosheet transistor 153 is submerged in the mask layer 152. The masklayer 152 protects the first dipole layer 150 within the first nanosheettransistor 155, such as a p-channel FET, during the subsequent masklayer etch-back process (FIG. 27). The mask layer 152 may be anysuitable masking material, such as a photoresist layer, a BARC (bottomanti-reflective coating) layer, a SOG (spin-on-glass) layer, or a SOC(spin-on-carbon) layer, and may be deposited by spin coating or anysuitable deposition technique.

In FIG. 27, the mask layer 152 is recessed to expose the first dipolelayer 150 within the second nanosheet transistor 153. The recess of themask layer 152 may be performed using a suitable etch-back process, suchas dry etch, wet etch, or reactive ion etch (RIE). The etch-back processuses an etchant that selectively removes the mask layer 152 but not thefirst dipole layer 150. The recessed mask layer 152 has a top surface157 that may be at a level between the topmost first semiconductor layer106 b of the first nanosheet transistor 155 and the bottom-most firstsemiconductor layer 106 a of the second nanosheet transistor 153. Thetop surface 157 defines the boundary between the first nanosheettransistor 155 and the second nanosheet transistor 153.

In FIG. 28, the first dipole layer 150 that is not covered by the masklayer 152 is removed. The removal process removes the first dipole layer150 to expose the IL 148 (formed on the first semiconductor layers 106a) within the second nanosheet transistor 153. The removal process alsoexposes the top surface 157 of the mask layer 152 and a portion of thefirst dipole layer 150 surrounding the mask layer 152. The removalprocess may be any suitable processes, such as dry etch, wet etch, or acombination thereof. In some embodiments, the first dipole layer 150 isremoved by a wet etch using NH₄OH, dilute hydrofluoric acid (HF) (e.g.,2% HF), buffered HF (e.g., 30-50% ammonium fluoride (NH₄F) and 5-10%HF)), or any combination thereof.

Next, after removal of the first dipole layer 150 within the secondnanosheet transistor 153, a second dipole layer 154 is formed on theexposed IL 148, the top surface 157 of the mask layer 152, and theexposed liner 119. The second dipole layer 154 surrounds the firstsemiconductor layers 106 a within the second nanosheet transistor 153.Likewise, the second dipole layer 154 may be configured to includepositive polarity or negative polarity, depending on the conductivitytype of the second nanosheet transistor 153. The second dipole layer 154serves to enhance or modify threshold voltage for the second nanosheettransistor 153. In cases where the second nanosheet transistor 153 is an-channel FET, the second dipole layer 154 can be a negative polaritydipole (n-dipole) layer formed from a material inherently including anegative polarity. Such materials may include, but are not limited to,lanthanum oxide (La₂O₃), magnesium oxide (MgO), yttrium oxide (Y₂O₃),gadolinium oxide (Gd₂O₃), or the like. The second dipole layer 154 canbe formed by ALD, CVD, or any suitable conformal deposition technique inorder to ensure uniform thickness of the second dipole layer 154. Thethickness of the first dipole layer 150 is chosen based on deviceperformance considerations. In some embodiments, the first dipole layer150 has a thickness ranging from about 0.05 nm to about 2 nm.

In FIG. 29A, the mask layer 152 is removed. The removal process may useash process or dry/wet etch process identical or similar to the processused for removal of the mask layer 152 as discussed in FIG. 27. Theremoval process selectively removes the mask layer 152 but not the firstdipole layer 150 and the second dipole layer 154. The second dipolelayer 154 on the top surface 157 of the mask layer 152 (FIG. 28) isremoved along with the mask layer 152. The openings 151 within the firstnanosheet transistor 155 are revealed upon removal of the mask layer152, exposing the first semiconductor layers 106 b being surrounded bythe first dipole layer 150.

FIG. 29A illustrates one embodiment where the first semiconductor layers106 b within the first nanosheet transistor 155 are surrounded by thefirst dipole layer 150, and the first semiconductor layers 106 a withinthe second nanosheet transistor 153 are surrounded by the second dipolelayer 154. In some embodiments, which can be combined with one or moreembodiments (e.g., FIGS. 37A, 37B, 39A, 39B) discussed in thisdisclosure, one or more second nanosheet transistors 153 in thesemiconductor device structure 100 are further proceeded to have thesecond dipole layer 154 removed from the first semiconductor layers 106a and from the liner 119, such as an alternative embodiment shown inFIG. 29B. The removal of the second dipole layer 154 can be done afterremoving the mask layer 152 by a suitable selective etch process thatremoves the second dipole layer 154 but not the first dipole layer 150.By configuring one or more second nanosheet transistors 153 to includethe second dipole layer 154 over the first semiconductor layers 106 aand one or more second nanosheet transistors 153 to not include thesecond dipole layer 154 over the first semiconductor layers 106 a, thesemiconductor device structure 100 can provide CFETs havingmulti-threshold voltage schemes according to the application needs.

In FIG. 30, the semiconductor device structure 100 is subjected to athermal treatment 131. The second dipole layer 154 and the first dipolelayer 150 are diffused into and mixed with the IL 148 as a result of thethermal treatment 131. In some embodiments, the interface between the IL148 and the first dipole layer 150 and the interface between the IL 148and the second dipole layer 154 may not be observed after the thermaltreatment. In some embodiments, the diffusion of the second dipole layer154 and the IL 148 forms a first intermixed layer 156 surrounding and incontact with the first semiconductor layers 106 a.

Likewise, the diffusion/intermixing of the first dipole layer 150 andthe IL 148 forms a second intermixed layer 158 surrounding and incontact with the first semiconductor layers 106 b. The first dipolelayer 150 also diffuses into the IL 148 in contact with the well portion116 of the substrate 101 and forms a bottom intermixed layer 159. Thefirst intermixed layer 156, the second intermixed layers 158, and thebottom intermixed layer 159 can be considered as modified IL layers. Theterm “first/second intermixed layer” or “modified IL layer” as used inthis disclosure denotes a reaction product of the IL 148 and thefirst/second dipole layer 150/154, which can be a compound, acomposition or a mixture, depending on the thermal treatment used. Insome embodiments, the first/second intermixed layer 156/158 or themodified IL layer can be an IL doped with materials from the seconddipole layer 154 or the first dipole layer 150.

In some alternative embodiments, which can be combined with anyembodiment(s) discussed in this disclosure, the thermal treatment maycause portions of the second dipole layer 154 to diffuse into the IL 148and form an intermixed layer 156 a sandwiched between the IL 148 and thesecond dipole layer 154, as an alternative embodiment shown in FIG. 31A.

In some alternative embodiments, which can be combined with anyembodiment(s) discussed in this disclosure, the thermal treatment maycause portions of the first dipole layer 150 to diffuse into the IL 148and form an intermixed layer 158 a sandwiched between the IL 148 and thefirst dipole layer 150, as an alternative embodiment shown in FIG. 31B.

The thermal treatment 131 can be any type of anneal, such as rapidthermal anneal, a spike anneal, a soak anneal, a laser anneal, a furnaceanneal, etc. The thermal treatment may be performed for about 0.5seconds to about 60 seconds, such as about 10 seconds to about 30seconds, and at a temperature range of about 450° C. to about 1200° C.The thermal treatment may be performed in an atmosphere of gas, such asa nitrogen-containing gas, an oxygen-containing gas, ahydrogen-containing gas, an argon-containing gas, a helium-containinggas, or any combinations thereof. Exemplary gas may include, but are notlimited to, N₂, NH₃, O₂, N₂O, Ar, He, H, etc.

After the thermal treatment, the semiconductor device structure 100 issubjected to a wet treatment. The wet treatment removes the first andsecond dipole layers 150, 154 formed on the liner 119, the liner 115 andthe insulating material 118, as shown in FIG. 30. The wet treatment maybe a wet etch such as a SPM process, an APM process, or a HPM processdiscussed above.

In FIG. 32, a high-K (HK) dielectric layer 160 is formed on the exposedsurfaces of the semiconductor device structure 100. In some embodiments,the HK dielectric layer 160 is formed to wrap around the firstintermixed layer 156 (or the second dipole layer 154) and the secondintermixed layer 158 (or the first dipole layer 150). The HK dielectriclayer 160 also forms on the liner 119, the insulating material 118, theliner 115, and the bottom intermixed layer 159. The HK dielectric layer160 may include or made of hafnium oxide (HfO₂), hafnium silicate(HfSiO), hafnium silicon oxynitride (HfSiON), hafnium aluminum oxide(HfAlO), hafnium lanthanum oxide (HfLaO), hafnium zirconium oxide(HfZrO), hafnium tantalum oxide (HMO), hafnium titanium oxide (HfTiO),lanthanum oxide (LaO), aluminum oxide (AlO), aluminum silicon oxide(AlSiO), zirconium oxide (ZrO), titanium oxide (TiO), tantalum oxide(Ta₂O₅), yttrium oxide (Y₂O₃), silicon oxynitride (SiON), or othersuitable high-k materials. The HK dielectric layer 160 may be aconformal layer formed by a conformal process, such as an ALD process ora CVD process. The HK dielectric layer 160 may have a thickness rangingfrom about 0.5 nm to about 3 nm.

In FIG. 33, a third dipole layer 163 is formed on the exposed surfacesof the semiconductor device structure 100. In some embodiments, thethird dipole layer 163 is formed on the HK dielectric layer 160.Depending on the conductivity type of the first nanosheet transistor155, the third dipole layer 163 may be configured to include positivepolarity or negative polarity. The third dipole layer 163 serves toenhance or modify threshold voltage for the first nanosheet transistor155. In cases where the first nanosheet transistor 155 is a p-channelFET, the third dipole layer 163 can be a positive polarity dipole(p-dipole) layer formed using ALD, CVD, or any suitable conformaldeposition technique. In some embodiments, the third dipole layer 163can be formed of the same or different material than the first dipolelayer 150. The third dipole layer 163 may have the same or differentthickness than the first dipole layer 150, depending on the application.

In FIG. 34, a mask layer 165 is formed on the third dipole layer 163 andin each opening 151 to cover the entire first semiconductor layers 106 band the third dipole layer 163 formed therearound within the firstnanosheet transistor 155. The mask layer 165 may be formed by firstforming a mask layer filling the openings 151, followed by an etch backprocess to recess the mask layer 165 to a level between the topmostfirst semiconductor layer 106 b of the first nanosheet transistor 155and the bottom-most first semiconductor layer 106 a of the secondnanosheet transistor 153. The mask layer 165 may use the same materialas the mask layer 152 and formed by spin coating or any suitabledeposition technique. The recess of the mask layer 165 exposes the thirddipole layer 163 within the second nanosheet transistor 153, as shown inFIG. 34.

In FIG. 35, the third dipole layer 163 that is not covered by the masklayer 165 is removed. The removal process removes the third dipole layer163 to expose the HK dielectric layer 160 (formed on the firstintermixed layer 156) within the second nanosheet transistor 153. Theremoval process also exposes the top surface 167 of the mask layer 165and a portion of the third dipole layer 163 surrounding the mask layer165. The removal process may be any suitable processes, such as theremoval process discussed above in FIG. 28 or the pre-clean processdiscussed above in FIG. 24.

In FIG. 36, after removal of the third dipole layer 163 within thesecond nanosheet transistor 153, a fourth dipole layer 169 is formed onthe exposed HK dielectric layer 160. In some embodiments, the fourthdipole layer 169 wraps around and in contact with the HK dielectriclayer 160 around the first semiconductor layers 106 a. The fourth dipolelayer 169 extends along the liner 119 and the top surface 167 of themask layer 165 and in contact with the HK dielectric layer 160, thethird dipole layer 163, and the mask layer 165. The fourth dipole layermay be configured to include positive polarity or negative polarity,depending on the conductivity type of the second nanosheet transistor153. The fourth dipole layer 169 serves to enhance or modify thresholdvoltage for the second nanosheet transistor 153. In cases where thesecond nanosheet transistor 153 is a n-channel FET, the fourth dipolelayer 169 can be a negative polarity dipole (n-dipole) layer formedusing ALD, CVD, or any suitable conformal deposition technique. In someembodiments, the fourth dipole layer 169 can be formed of the same ordifferent material from the second dipole layer 154. The fourth dipolelayer 169 may have the same or different thickness than the seconddipole layer 154, depending on the application.

In FIG. 37A, the mask layer 165 is removed. The removal process may useash process or dry/wet etch process identical or similar to the processused for removal of the mask layer 152 as discussed in FIG. 29A. Theremoval process selectively removes the mask layer 165 but not thefourth dipole layer 169 and the third dipole layer 163. The fourthdipole layer 169 on the top surface 167 of the mask layer 165 (FIG. 36)is removed along with the mask layer 165. The openings 151 within thefirst nanosheet transistor 155 are revealed upon removal of the masklayer 165, exposing the first semiconductor layers 106 b beingsurrounded by the third dipole layer 163 and the first semiconductorlayers 106 a being surrounded by the fourth dipole layer 169.

In some embodiments, which can be combined with one or more embodiments(e.g., FIGS. 29A, 29B, 31A, and 31B) discussed in this disclosure, oneor more second nanosheet transistors 153 in the semiconductor devicestructure 100 are further proceeded to have the fourth dipole layer 169removed from the first semiconductor layers 106 a and from the HKdielectric layer 160, such as an alternative embodiment shown in FIG.37B. The removal of the fourth dipole layer 169 can be done afterremoving the mask layer 165 by a suitable selective etch process thatremoves the fourth dipole layer 169 but not the third dipole layer 163.By configuring one or more second nanosheet transistors 153 to includethe fourth dipole layer 169 over the first semiconductor layers 106 aand one or more second nanosheet transistors 153 to not include thefourth dipole layer 169 over the first semiconductor layers 106 a, thesemiconductor device structure 100 can provide CFETs havingmulti-threshold voltage schemes according to the application needs.

In FIG. 38, the semiconductor device structure 100 is subjected to athermal treatment 175. The thermal treatment 175 may be the same as thethermal treatment 131 discussed above with respect to FIG. 30. The thirddipole layer 163 and the fourth dipole layer 169 are diffused or driveninto the HK dielectric layer 160 as a result of the thermal treatment175. In some embodiments, the third dipole layer 163 and the fourthdipole layer 169 mix with the HK dielectric layer 160 and form a thirdintermixed layer 171 and a fourth intermixed layer 173, respectively. Insome embodiments, the interface between the HK dielectric layer 160 andthe third dipole layer 163 and the interface between the HK dielectriclayer 160 and the fourth dipole layer 169 may not be observed after thethermal treatment. The third intermixed layer 171 wraps around and incontact with the second intermixed layer 158. The third dipole layer 163extending over the liner 119, the insulating material 118, the liner115, and the bottom intermixed layer 159 also diffuses into the HKdielectric layer 160 and forms a fifth intermixed layer 181 in contactwith the liner 119, the insulating material 118, the liner 115, and thebottom intermixed layer 159. Likewise, the fourth intermixed layer 173wraps around and in contact with the first intermixed layer 156. Thefourth dipole layer 169 extending over the liner 119 also diffuses intothe HK dielectric layer 160 and forms the sixth intermixed layer 183 incontact with the liner 119.

The third intermixed layer 171, the fourth intermixed layers 173, thefifth intermixed layer 181, and the sixth intermixed layer 183 can beconsidered as modified HK dielectric layers. The term“third/fourth/fifth/sixth intermixed layer” or “modified HK dielectriclayer” as used in this disclosure denotes a reaction product of the HKdielectric layer 160 and the third/fourth dipole layer 163/169, whichcan be a compound, a composition or a mixture, depending on the thermaltreatment used. In some embodiments, the third/fourth/fifth/sixthintermixed layer 171/173/181/183 or the modified HK dielectric layer canbe a HK dielectric layer doped with materials from the third dipolelayer 163 or the fourth dipole layer 169.

In some embodiments, after the thermal treatment 175, the third dipolelayer 163 and the fourth dipole layer 169 that are not driven into theHK dielectric layer 160 may be optionally removed by a dry etch (e.g.,RIE), a wet etch (e.g., SPM process, APM process, or HPM process),ozone-deionized Water (O₃-DI), and/or combination thereof.

FIG. 38 illustrates an embodiment where the first semiconductor layers106 b within the first nanosheet transistor 155 are sequentiallysurrounded by the second intermixed layer 158 (e.g., the reactionproduct of the IL 148 and the first dipole layer 150) and the thirdintermixed layer 171 (e.g., the reaction product of the HK dielectriclayer 160 and the third dipole layer 163), and the first semiconductorlayers 106 a within the second nanosheet transistor 153 are sequentiallysurrounded by the first intermixed layer 156 (e.g., the reaction productof the IL 148 and the second dipole layer 154) and the fourth intermixedlayer 173 (e.g., the reaction product of the HK dielectric layer 160 andthe fourth dipole layer 169).

In some alternative embodiments, which can be combined with anyembodiment(s) discussed in this disclosure, the thermal treatment maycause portions of the fourth dipole layer 169 to diffuse into the HKdielectric layer 160 and form an intermixed layer 173 a sandwichedbetween the HK dielectric layer 160 and the fourth dipole layer 169, asan alternative embodiment shown in FIG. 39A.

In some alternative embodiments, which can be combined with anyembodiment(s) discussed in this disclosure, the thermal treatment maycause portions of the third dipole layer 163 to diffuse into the HKdielectric layer 160 and form an intermixed layer 171 a sandwichedbetween the HK dielectric layer 160 and the third dipole layer 163, asan alternative embodiment shown in FIG. 39B.

In FIG. 40, a first gate electrode layer 172 is formed in each opening151 (FIG. 38) and on the third intermixed layer 171 and the fourthintermixed layer 173. The first gate electrode layer 172 is formed onthe third intermixed layer 171 and the fourth intermixed layer 173 tosurround a portion of each first semiconductor layer 106 b, 106 a,respectively. The first gate electrode layer 172 includes one or morelayers of conductive material, such as polysilicon, aluminum, copper,titanium, tantalum, tungsten, cobalt, molybdenum, tantalum nitride,nickel silicide, cobalt silicide, TiN, WN, WCN, TiAl, TiTaN, TiAlN, TaN,TaCN, TaC, TaSiN, metal alloys, other suitable materials, and/orcombinations thereof. The first gate electrode layers 172 may be formedby PVD, CVD, ALD, electro-plating, or other suitable method. In someembodiments, the first gate electrode layer 172 includes a p-type gateelectrode layer such as TiN, TaN, TiTaN, TiAlN, WCN, W, Ni, Co, or othersuitable material.

In FIG. 41, an etch-back process is performed on the first gateelectrode layer 172 to recess the first gate electrode layer 172. Theetch-back process uses an etchant that selectively removes the firstgate electrode layer 172 but not the fourth intermixed layer 173. Thefirst gate electrode layer 172 is recessed so that a top surface 177 ofthe first gate electrode layer 172 is at a level between the topmostfirst semiconductor layer 106 b of the first nanosheet transistor 155and the bottom-most first semiconductor layer 106 a of the secondnanosheet transistor 153. The top surface 177 of the first gateelectrode layer 172 generally defines the boundary between the firstnanosheet transistor 155 and the second nanosheet transistor 153.

Next, a second gate electrode layer 179 is formed in the opening 151revealed as the result of the recess of the first gate electrode layer172 and on the fourth intermixed layer 173. The second gate electrodelayer 179 is formed on the fourth intermixed layer 173 to surround aportion of each first semiconductor layer 106 a. The second gateelectrode layer 179 includes one or more layers of conductive material,such as polysilicon, aluminum, copper, titanium, tantalum, tungsten,cobalt, molybdenum, tantalum nitride, nickel silicide, cobalt silicide,TiN, WN, WCN, TiAl, TiTaN, TiAlN, TaN, TaCN, TaC, TaSiN, metal alloys,other suitable materials, and/or combinations thereof. The second gateelectrode layers 179 may be formed by PVD, CVD, ALD, electro-plating, orother suitable method. In some embodiments, the second gate electrodelayer 179 includes an n-type gate electrode layer such as TiAlC, TaAlC,TiSiAlC, TiC, TaSiAlC, or other suitable material. Therefore, the secondgate electrode layer 179 serves as a gate electrode layer for ann-channel FET, and the first gate electrode layer 172 serves as a gateelectrode layer for a p-channel FET. Depending on the application, thefirst gate electrode layer 172 and the second gate electrode layer 179may include the same material.

FIG. 42A illustrates an alternative embodiment incorporating variousembodiments shown in FIGS. 29A-29B, 31A-31B, 37A-37B, and 39A-39B, inwhich the IL 148 of the first nanosheet transistor 155 is modified toselectively include the first dipole layer 150 (e.g., a first p-dipolelayer), such as an alternative embodiment shown in FIG. 42C; the IL 148of the second nanosheet transistor 153 is modified to selectivelyinclude the second dipole layer 154 (e.g., a first n-dipole layer), suchas an alternative embodiment shown in FIG. 42B; the HK dielectric layer160 is modified to selectively include the third dipole layer 163 (e.g.,a second p-dipole layer), such as the alternative embodiment shown inFIG. 42C; and the HK dielectric layer 160 is modified to selectivelyinclude the fourth dipole layer 169 (e.g., a second n-dipole layer),such as the alternative embodiment shown in FIG. 42B. By using theseembodiments, CFETs having multi-threshold voltage schemes can beprovided at different regions of the semiconductor device structure 100.Particularly, these embodiments enable a zero thickness dipolepatterning for multiple threshold voltage tuning by diffusing and/orintermixing the n-dipole or p-dipole layers with the IL 148 and the HKdielectric layer 160 to form modified IL 148 and HK dielectric layer 160with minimum thickness increase of the modified IL 148 (e.g., firstintermixed layer 156/intermixed layer 156 a and second intermixed layer158/intermixed layer 158 a) and the modified HK dielectric layer 160(e.g., third intermixed layer 171/intermixed layer 171 a and the fourthintermixed layer 173/intermixed layer 173 a).

FIGS. 43A, 43B, and 43C illustrate cross-sectional side views of thesemiconductor device structure 100 after the first and second gateelectrode layers 172 and 179 are formed. FIG. 43D is an enlarged view ofa portion of the semiconductor device structure 100 showing the firstand second nanosheet transistors 155, 153.

In FIGS. 44A and 44C, source/drain (S/D) contacts 176 are formed in theILD layer 164. Prior to forming the S/D contacts 176, contact openingsare formed in the ILD layer 164 to expose the epitaxial S/D feature 149.Suitable photolithographic and etching techniques are used to form thecontact openings through various layers, including the ILD layer 164 andthe CESL 162 to expose the epitaxial S/D features 149.

After the formation of the contact openings, a silicide layer 178 isformed on the epitaxial S/D features 149. The silicide layer 178conductively couples the epitaxial S/D features 149 to the subsequentlyformed S/D contacts 176. The silicide layer 178 may be formed bydepositing a metal source layer over the epitaxial S/D features 149 andperforming a rapid thermal annealing process. During the rapid annealprocess, the portion of the metal source layer over the epitaxial S/Dfeatures 149 reacts with silicon in the epitaxial S/D features 149 toform the silicide layer 178. Unreacted portion of the metal source layeris then removed. The material of the silicide layer 178 is chosen basedon the conductivity type of the second nanosheet transistor 153. Forn-channel FETs, the silicide layer 178 may be made of a materialincluding one or more of TiSi, CrSi, TaSi, MoSi, ZrSi, HfSi, ScSi, Ysi,HoSi, TbSI, GdSi, LuSi, DySi, ErSi, YbSi, or combinations thereof. Forp-channel FETs, the silicide layer 178 may be made of a materialincluding one or more of NiSi, CoSi, MnSi, Wsi, FeSi, RhSi, PdSi, RuSi,PtSi, IrSi, OsSi, or combinations thereof. In some embodiments, thesilicide layer 178 is made of a metal or metal alloy silicide, and themetal includes a noble metal, a refractory metal, a rare earth metal,alloys thereof, or combinations thereof.

Next, a conductive material is formed in the contact openings and formthe S/D contacts 176. The conductive material may be made of a materialincluding one or more of Ru, Mo, Co, Ni. W, Ti, Ta, Cu, Al, TiN and TaN.While not shown, a barrier layer (e.g., TiN, TaN, or the like) may beformed on sidewalls of the contact openings prior to forming the S/Dcontacts 176. Then, a planarization process, such as CMP, is performedto remove excess deposition of the contact material and expose the topsurface of the second gate electrode layer 179.

It is understood that the semiconductor device structure 100 may undergofurther complementary metal oxide semiconductor (CMOS) and/orback-end-of-line (BEOL) processes to form various features such astransistors, contacts/vias, interconnect metal layers, dielectriclayers, passivation layers, etc. The semiconductor device structure 100may also include backside contacts (not shown) on the backside of thesubstrate 101 by flipping over the semiconductor device structure 100,removing the substrate 101, and selectively connecting source or drainfeature/terminal of the epitaxial S/D features 146 or 149 to a backsidepower rail (e.g., positive voltage VDD or negative voltage VSS) throughthe backside contacts. Depending on the application, the source or drainfeature/terminal of the epitaxial S/D features 146 or 149 and the firstand second gate electrode layers 172, 179 may be connected to afrontside power source.

Embodiments of the present disclosure provide a semiconductor devicestructure including CFETs each having a first nanosheet transistor and asecond nanosheet disposed over the first nanosheet transistor. The firstnanosheet transistor may be a p-channel FET and the second nanosheettransistor may be an n-channel FET. Each of the nanosheet channels ofthe p-channel FET may be surrounded by a modified IL and a modified HKdielectric layer. Each of the modified IL and the modified HK may or maynot include a p-dipole layer. Likewise, each of the nanosheet channelsof the n-channel FET may be surrounded by the modified IL and themodified HK dielectric layer. Each of the modified IL and the modifiedHK may or may not include an n-dipole layer. As a result, the CFETs indifferent regions of the semiconductor device structure can be operatedat different threshold voltages, resulting in improved devicereliability and performance. Embodiments of the present disclosure alsoallow precise gate patterning of the CFETs even if the n-channel FET andthe p-channel FET are vertically stacked at different levels of theCFET.

An embodiment is a semiconductor device structure. The structureincludes one or more first semiconductor layers, each firstsemiconductor layer of the one or more first semiconductor layers issurrounded by a first intermixed layer and a fourth intermixed layer.The first intermixed layer is disposed between the first semiconductorlayer and the fourth intermixed layer. The first intermixed layerincludes a first material and a second material, and the fourthintermixed layer includes a third material and a fourth material. Thestructure also includes one or more second semiconductor layers disposedbelow and aligned with the one or more first semiconductor layers. Eachsecond semiconductor layer of the one or more second semiconductorlayers is surrounded by a second intermixed layer and a third intermixedlayer. The second intermixed layer is disposed between the secondsemiconductor layer and the third intermixed layer. The secondintermixed layer includes the first material and a fifth material, andthe third intermixed layer includes the third material and a sixthmaterial. The second material and the fourth material are a dipolematerial having a first polarity, and the fifth material and the sixthmaterial are a dipole material having a second polarity opposite of thefirst polarity.

Another embodiment is a semiconductor device structure. The structureincludes one or more first semiconductor layers, wherein eachsemiconductor layer of the one or more first semiconductor layers issurrounded by a first intermixed layer. The first intermixed layerincludes a first dipole material having a first polarity. The structurealso includes one or more second semiconductor layers disposed below andaligned with the one or more first semiconductor layers. Eachsemiconductor layer of the one or more second semiconductor layers issurrounded by a second intermixed layer. The second intermixed layerincludes a second dipole material having a second polarity opposite ofthe first polarity. The structure also includes a high-K dielectriclayer in contact with the first intermixed layer and the secondintermixed layer, respectively. The structure further includes a firstsource/drain feature in contact with the one or more first semiconductorlayers, and a second source/drain feature in contact with the one ormore second semiconductor layers.

A further embodiment is a method for forming a semiconductor devicestructure. The method includes forming a stack of layers comprising aplurality of first semiconductor layers and a plurality of secondsemiconductor layers alternatingly stacked. The method includes forminga first source/drain feature and a second source/drain feature, whereinthe first source/drain feature is disposed below and aligned with thesecond source/drain feature, and the first source/drain feature and thesecond source/drain feature are in contact with the plurality of firstsemiconductor layers. The method includes removing portions of theplurality of second semiconductor layers to expose portions of each ofthe plurality of first semiconductor layers. The method includes formingan interfacial layer to surround exposed portions of each of theplurality of first semiconductor layers. The method includes forming afirst dipole layer on the interfacial layer formed on a first group ofthe plurality of first semiconductor layers, wherein the first dipolelayer comprises a first dipole material having a first polarity. Themethod includes forming a second dipole layer on the interfacial layerformed on a second group of the plurality of first semiconductor layers,wherein the second dipole layer comprises a second dipole materialhaving a second polarity opposite of the first polarity. The methodincludes subjecting the first and second dipole layers to a firstthermal treatment. The method includes forming a high-K dielectric layerto surround the interfacial layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

The invention claimed is:
 1. A semiconductor device structure,comprising: one or more first semiconductor layers, each firstsemiconductor layer of the one or more first semiconductor layers issurrounded by a first intermixed layer and a fourth intermixed layer,wherein the first intermixed layer is disposed between the firstsemiconductor layer and the fourth intermixed layer, and the firstintermixed layer comprises a first material and a second material, andthe fourth intermixed layer comprises a third material and a fourthmaterial; and one or more second semiconductor layers disposed below andaligned with the one or more first semiconductor layers, each secondsemiconductor layer of the one or more second semiconductor layers issurrounded by a second intermixed layer and a third intermixed layer,wherein the second intermixed layer is disposed between the secondsemiconductor layer and the third intermixed layer, and the secondintermixed layer comprises the first material and a fifth material, andthe third intermixed layer comprises the third material and a sixthmaterial, wherein the second material and the fourth material are adipole material having a first polarity, and the fifth material and thesixth material are a dipole material having a second polarity oppositeof the first polarity.
 2. The semiconductor device structure of claim 1,further comprising: a first gate electrode layer in contact with thethird intermixed layer and the fourth intermixed layer.
 3. Thesemiconductor device structure of claim 2, further comprising: a fifthintermixed layer in contact with the first gate electrode layer, whereinthe fifth intermixed layer comprises a same material as the thirdintermixed layer; and a sixth intermixed layer in contact with the firstgate electrode layer, wherein the sixth intermixed layer comprises asame material as the fourth intermixed layer.
 4. The semiconductordevice structure of claim 3, further comprising: a first liner incontact with the fifth intermixed layer and the sixth intermixed layer,wherein the first liner comprises a low-k dielectric material.
 5. Thesemiconductor device structure of claim 4, further comprising: aninsulating material in contact with the fifth intermixed layer; and asecond liner in contact with the fifth intermixed layer, wherein thesecond liner is different from the first liner, and the second linercomprises a semiconductor material.
 6. The semiconductor devicestructure of claim 4, further comprising: a bottom intermixed layer incontact with the fifth intermixed layer, wherein the bottom intermixedlayer comprises a same material as the second intermixed layer.
 7. Thesemiconductor device structure of claim 1, further comprising: a firstgate electrode layer in contact with the third intermixed layer; and asecond gate electrode layer in contact with the fourth intermixed layer,wherein the second gate electrode layer is different from the first gateelectrode layer.
 8. The semiconductor device structure of claim 7,further comprising: a fifth intermixed layer in contact with the firstgate electrode layer; and a sixth intermixed layer in contact with thesecond gate electrode layer.
 9. The semiconductor device structure ofclaim 1, wherein the first material comprises an oxygen-containingmaterial or a silicon-containing material, and the third materialcomprises a high-k (HK) dielectric material.
 10. A semiconductor devicestructure, comprising: one or more first semiconductor layers, whereineach semiconductor layer of the one or more first semiconductor layersis surrounded by a first intermixed layer, and the first intermixedlayer comprises a first dipole material having a first polarity; one ormore second semiconductor layers disposed below and aligned with the oneor more first semiconductor layers, wherein each semiconductor layer ofthe one or more second semiconductor layers is surrounded by a secondintermixed layer, and the second intermixed layer comprises a seconddipole material having a second polarity opposite of the first polarity;a high-K dielectric layer in contact with the first intermixed layer andthe second intermixed layer, respectively; a first source/drain featurein contact with the one or more first semiconductor layers; and a secondsource/drain feature in contact with the one or more secondsemiconductor layers.
 11. The semiconductor device structure of claim10, further comprising: a first dipole layer surrounding eachsemiconductor layer of the one or more first semiconductor layers,wherein the first dipole layer comprising the first dipole material, andthe first intermixed layer is disposed between the first dipole layerand the high-K dielectric layer.
 12. The semiconductor device structureof claim 11, further comprising: a second dipole layer surrounding eachsemiconductor layer of the one or more second semiconductor layers,wherein the second dipole layer comprising the second dipole material,and the second intermixed layer is disposed between the second dipolelayer and the high-K dielectric layer.
 13. The semiconductor devicestructure of claim 12, further comprising: a third intermixed layersurrounding and in contact with each semiconductor layer of the one ormore first semiconductor layers, wherein the third intermixed layercomprises a third dipole material having the first polarity.
 14. Thesemiconductor device structure of claim 13, further comprising: a fourthintermixed layer surrounding and in contact with each semiconductorlayer of the one or more second semiconductor layers, wherein the fourthintermixed layer comprises a fourth dipole material having the secondpolarity opposite of the first polarity.
 15. The semiconductor devicestructure of claim 10, further comprising: an interfacial layersurrounding and in contact with each semiconductor layer of the one ormore first semiconductor layers and each semiconductor layer of the oneor more second semiconductor layers; and a fifth intermixed layersurrounding each semiconductor layer of the one or more firstsemiconductor layers, wherein the interfacial layer is disposed betweenthe fifth intermixed layer and each semiconductor layer of the one ormore first semiconductor layers, and wherein the fifth intermixed layercomprises a third dipole material having the first polarity.
 16. Thesemiconductor device structure of claim 15, further comprising: a sixthintermixed layer surrounding each semiconductor layer of the one or moresecond semiconductor layers, wherein the interfacial layer is disposedbetween the sixth intermixed layer and each semiconductor layer of theone or more second semiconductor layers, and wherein the sixthintermixed layer comprises a fourth dipole material having the secondpolarity opposite of the first polarity.
 17. The semiconductor device ofclaim 10, further comprising: a first gate electrode layer in contactwith the first intermixed layer; and a second gate electrode layer incontact with the second intermixed layer, wherein the second gateelectrode layer is different from the first gate electrode layer. 18.The semiconductor device of claim 10, wherein the one or more of firstsemiconductor layers have a first height, and a distance between abottommost first semiconductor layer and a topmost second semiconductorlayer has a second height greater than the first height.
 19. A methodfor forming a semiconductor device structure, comprising: forming astack of layers comprising a plurality of first semiconductor layers anda plurality of second semiconductor layers alternatingly stacked;forming a first source/drain feature and a second source/drain feature,wherein the first source/drain feature is disposed below and alignedwith the second source/drain feature, and the first source/drain featureand the second source/drain feature are in contact with the plurality offirst semiconductor layers; removing portions of the plurality of secondsemiconductor layers to expose portions of each of the plurality offirst semiconductor layers; forming an interfacial layer to surroundexposed portions of each of the plurality of first semiconductor layers;forming a first dipole layer on the interfacial layer formed on a firstgroup of the plurality of first semiconductor layers, wherein the firstdipole layer comprises a first dipole material having a first polarity;forming a second dipole layer on the interfacial layer formed on asecond group of the plurality of first semiconductor layers, wherein thesecond dipole layer comprises a second dipole material having a secondpolarity opposite of the first polarity; subjecting the first and seconddipole layers to a first thermal treatment; and forming a high-Kdielectric layer to surround the interfacial layer.
 20. The method ofclaim 19, further comprising: forming a third dipole layer on the high-Kdielectric layer surrounding the first group of the plurality of firstsemiconductor layers, wherein the third dipole layer comprises a thirddipole material having the first polarity; forming a fourth dipole layeron the high-K dielectric layer surrounding the second group of theplurality of first semiconductor layers, wherein the fourth dipole layercomprises a fourth dipole material having the second polarity oppositeof the first polarity; subjecting the third and fourth dipole layers toa second thermal treatment; and forming a gate electrode layer tosurround the high-K dielectric layer surrounding each of the pluralityof first semiconductor layers.